ACS' ServoBoost algorithm increases motion accuracy & throughput



Stage used for the test of ServoBoost control algorithm with MC4U Control Module

ACS Motion Control has developed a powerful algorithm that provides automatic adaptation to large load changes and automatic compensation for disturbances, resonances, axes interaction, cogging and more  in real-time.  The ServoBoost™ algorithm not only identifies disturbances in real time, but also analyzes the root cause, compensates for it and attenuates its impact.  The result is decreased move & settle time, ability to handle significant changes in load, and elimination of cogging and similar issues, which provides an increase in accuracy, throughput and overall performance. Field results have shown measurable performance improvements several times that of competing motion control products.

Designed for equipment that requires high accuracy and performance, including state-of-the-art semiconductor inspection, flat panel inspection, electronics assembly and bio-medical automated analysis systems, the ServoBoost algorithm enables extremely fast settling time and standstill jitter in the sub-nanometer region.  The ServoBoost algorithm combines smooth and constant velocity with stability and robustness to provide a high level of control.

The ServoBoost algorithm is already field proven in various applications. In one example, on a three-axis machine designed to manufacture and test ultra-precision optical components, ServoBoost helped to significantly increase the performance.

Applying the ServoBoost control algorithms dramatically improved the performance of the system. This is especially evident when performing small steps down to 2nm, or even smaller, with a residual stand still jitter of about 250 pm. As air bearing stages show inherently low damping, it is more challenging to achieve such results on air bearing stages in comparison to hydro-static or roller type bearings (staged by Eitzenberger Luftlagertechnik GmbH). The ServoBoost control eliminates this drawback, as it provides sufficient digitally controlled damping, said Dr.-Ing. Giora Baum of Technische Beratung, which was involved in the testing at the Fraunhofer Institute FhG-IPT in Aachen Germany.

ACS motion control